Optics: measuring and testing – Of light reflection
Patent
1978-05-26
1980-05-06
Corbin, John K.
Optics: measuring and testing
Of light reflection
G01N 2148
Patent
active
042014794
ABSTRACT:
The present invention relates to a device for measuring the reflection of a plane, specularly reflecting surface, in which a measuring beam of radiation is directed onto the surface to be measured through an optical converging lens and the radiation reflected from the surface is directed through the same lens to a radiation receiver. In such a system, preferably, the optical connections between the source of radiation and the converging lens and between the lens and the radiation receiver are established by means of a fiber-optical photoconductor or a lens and mirror systems. Such a device may be employed, for example, for measuring the reflection of thin layers deposited in a vacuum evaporator.
REFERENCES:
patent: 3229564 (1966-01-01), Meltzer
patent: 3565568 (1971-02-01), Hock
Melsheimer et al. "Portable Visible-Infrared Reflectometer", Rev. Sci. Inum. vol. 48, No. 4 (Apr. 1977) pp. 482-483.
Balzers Aktiengesellschaft fur Hochvakuumtechnik und Dunne Schic
Corbin John K.
Rosenberger R. A.
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