Device for measuring the evaporation rate in vacuum evaporation

Details Device for measuring the evaporation rate in vacuum evaporation Device for measuring the evaporation rate in vacuum evaporation

1975-06-13

1977-05-17

Albritton, C. L.

Electric heating

Heating devices

Resistive element: igniter type

118 5, 118 7, 118 491, 219271, C23C 1308

Patent

active

040243761

ABSTRACT:
A measuring device for determining the rate of evaporation of materials in vacuum systems, particularly for producing thin layers of precise thickness on substrates. An electrically conducting housing has an opening which can be aligned with the material to be evaporated. An electrode located within the housing and insulated therefrom, is connected to an evaluation device for the evaporation rate. The electrode is located outside the line of sight through the opening of the housing, and the electrode has a positive potential with respect to the housing. The current flowing between the housing and the electrode is applied to the evaluation device.

REFERENCES:
patent: 3235480 (1966-02-01), Swartz et al.
patent: 3313914 (1967-04-01), Roberts, Jr. et al.
patent: 3316386 (1967-04-01), Yaffe et al.
patent: 3654109 (1972-04-01), Hohl et al.

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