Device for measuring the deformations of a diaphragm

Details Device for measuring the deformations of a diaphragm Device for measuring the deformations of a diaphragm

1990-07-26

1992-03-03

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

73721, 73727, 338 4, G01L 906, G01L 1904

Patent

active

050921770

ABSTRACT:
A device for measuring the deformations of a flexible diaphragm (1) sealed by its periphery to a support (2) and wherein are formed four sensors constituted by a thick layer of piezo-resistive material and connected as a Wheatstone bridge. The sensors are arranged on both sides of the diaphragm with, on each surface, a sensor (R3, R4) at the neighborhood of the center and a sensor (R1, R2) at the neighborhood of the periphery. A central sensor and a peripheral sensor of the opposite surface are arranged in opposite legs of the bridge, two sensors of the same surface having their connection point connected to a supply terminal of the bridge. The device serves as a pressure sensor.

REFERENCES:
patent: 2580407 (1952-01-01), Clark
patent: 3341794 (1967-09-01), Stedman
patent: 3455165 (1969-07-01), Huet
patent: 4116075 (1978-09-01), Ort
patent: 4140023 (1979-02-01), Edwards et al.
patent: 4311980 (1982-01-01), Prudenziati
patent: 4376929 (1983-03-01), Myhre

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