Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system
Patent
1986-01-16
1987-08-04
Levy, Stewart J.
Measuring and testing
Specimen stress or strain, or testing by stress or strain...
Specified electrical sensor or system
361280, G01N 300
Patent
active
046837582
ABSTRACT:
In measuring stresses present in material coatings deposited by sputtering, a pressure transducer is used as an in-situ sensor. The transducer has a flexible conductive surface clamped about its periphery to a rigid substrate and forms a variable capacitor with a relatively rigid conductor across an underlying evacuated chamber. A mask element having an aperture that covers an area confined within the boundary defined by the underlying evacuated space is located adjacent the flexible conductive surface to limit the exposed surface area to receive sputtered material coating. Electronic circuitry monitors changes in the capacitance of the sensor and reflects the stress types and values attributed to each coating.
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Hoffman David W.
Kukla Cassimer M.
Ford Motor Company
Godwin Jr. Paul K.
Levy Stewart J.
Raevis Robert R.
Sadler Clifford L.
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