Device for measuring semiconductor characteristics

Details Device for measuring semiconductor characteristics Device for measuring semiconductor characteristics

1981-05-01

1984-08-07

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, G01R 3126

Patent

active

044646275

ABSTRACT:
A device for measuring semiconductor characteristics, wherein electrodes are installed maintaining a gap on the front and back sides of a semiconductor specimen of which the characteristics are to be measured, at least one of the electrodes being transparent, the surface of the semiconductor specimen is scanned with a pulsed narrow photon beam via the transparent electrode, and a photovoltage generated between the front and back surfaces of the semiconductor specimen is taken out from the two electrodes via the capacitive coupling, in order to observe the distribution of characteristics in the surface of the semiconductor specimen.

REFERENCES:
patent: 4051437 (1977-09-01), Lile et al.
patent: 4287473 (1981-09-01), Sawyer
patent: 4333051 (1982-06-01), Goodman

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