Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1988-08-29
1989-07-11
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
356152, G01B 100
Patent
active
048475114
ABSTRACT:
Disclosed is a rectilinear motion measuring device which measures the X- and Y-axis displacement errors by detecting displacements of a rectilinearly moving body, while measuring the pitching and yawing errors by detecting the angle of inclination of the moving body and measuring the rolling error by detecting the displacement of the moving body at two different positions. For these purposes, the rectilinear motion measuring device is provided with means for detecting the displacement of the light source of a luminous flux generating means, means for detecting the displacements of the moving body on a magnified scale of .times.2n, and means for detecting the angle of inclination of the rectilinearly moving body. On measuring the respective error components, the fluctuations of the light source are corrected to preclude variation factors of the light source itself, enhancing the resolution and the accuracy of the measurement by providing separately a displacement detecting optical path and an angle detecting optical path.
REFERENCES:
patent: 3953133 (1976-04-01), Jacoby
patent: 4349838 (1982-09-01), Daniel
patent: 4792228 (1988-12-01), Haffner
patent: 4801977 (1989-01-01), Ishizaka et al.
"Precision Measurement of Rectilinear Motions by the Use of Laser Beam", by Takada et al., pp. 123-124; Scientific Lectures at 1984 Autumn Meeting of Precision Machinery Society.
"Advancing Inspection of Accuracy of Rectilinear Motions at Machining Center", Compiled by the Foundation for Promotion of Machine Tool Technology, May 1985.
Magara Kenji
Nishiyama Yuzuru
Takada Koji
Allen Stephone B.
Chuo Precision Industrial Co., Ltd.
Nelms David C.
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