Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1989-11-20
1990-11-13
Evans, F. L.
Optics: measuring and testing
By polarized light examination
With light attenuation
250561, 156601, 422249, G01B 1100
Patent
active
049697455
ABSTRACT:
A device used in a single-crystal production apparatus based on Czochralski method and designed for measuring the offset of the wire for lifting the growing crystal. In order to enable an easy and appropriate mounting and adjustment of the crystal lifting wire, while preventing abnormal oscillation of the axis of rotation of the growing crystal, the device has a block which fits in the upper end opening of a chamber. The block has a central through-hole which the wire penetrates. Light sources and photo-detectors are arranged to oppose each other across the through-hole. Slits are arranged between the wire and the photo-detectors. The device measures the offset from the outputs of the photo-detectors, and an alarm activates when the measured wire offset has exceeded an upper limit. In another form, the assembly including the block, light sources, photo-detectors and the slits is substituted by linear image sensor cameras.
REFERENCES:
patent: 4794263 (1988-12-01), Katsuoka et al.
patent: 4915775 (1990-04-01), Katsuoka et al.
Evans F. L.
Shin-Etsu Handotai Company Limited
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