Optics: measuring and testing – Range or remote distance finding – With photodetection
Patent
1989-01-11
1990-08-28
Larochi, Eugene R.
Optics: measuring and testing
Range or remote distance finding
With photodetection
356432, 422186, G02B 2714, G01N 2100, B01J 110
Patent
active
049520270
ABSTRACT:
A film forming device includes an optical device which has a light source, and a first optical system for projecting light beams split by a light splitting device. The light splitting device and the optical system steadily maintain the intensity center of the light beam projected onto a detecting surface of a light detector at an invariable position without positional fluctuation independently of fluctuation of an emitting angle to a thin film of the light source.
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patent: 4129358 (1978-12-01), Wei
patent: 4597630 (1986-06-01), Brandstetter et al.
patent: 4710030 (1987-12-01), Tauc et al.
patent: 4790664 (1988-12-01), Saito et al.
"Photothermal Deflection Spectroscopy and Detection", Applied Optics, Apr. 15, 1981, vol. 20, No. 8, pp. 1333-1344.
"Second Sound Spectroscopy: A New Method for Studying Optical Absortion in Solids", Physics Letters, Mar. 22, 1976, vol. 56A, No. 3, pp. 223-224.
Eguchi Ken
Kawada Haruki
Miyazaki Toshihiko
Nakagiri Takashi
Nishimura Yukuo
Canon Kabushiki Kaisha
Kachmarlk Ronald M.
Larochi Eugene R.
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