Device for measuring in three dimensions a topographical...

Optics: measuring and testing – Shape or surface configuration

Reexamination Certificate

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Reexamination Certificate

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07446885

ABSTRACT:
A device for measuring in three dimensions a topographical shape of an object. The device comprises an arrayed confocal imaging system having a confocal topographical mask provided for converting light produced by a light source into an array of small spots. The mask being mounted on a scanning member provided for moving the mask over successive positions over a predetermined distance. The device further comprises a confocal objective provided for mapping at successive object-position-in-focus the array of small spots output at said successive positions. The confocal objective may be mounted at a fixed position within said device.

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patent: 485 803 (1992-06-01), None
patent: 679 864 (1995-11-01), None

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