Device for masking or covering substrates

Details Device for masking or covering substrates Device for masking or covering substrates

1997-04-14

1998-09-01

Breneman, R. Bruce

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429809, 20429812, 20429814, 20429815, C23C 1434

Patent

active

058006877

ABSTRACT:
A device including a sputtering cathode 2 and masks for masking or covering portions of a surface of a substrates 27, having a center mask guide element 56 on which a center mask 26, which covers the substrate 27, is disposed and works together with an outer mask 4 in such a way that only the uncovered part of the substrate 27 is coated during the coating process. The inner and/or the outer masks 4, 26 can be adjusted independently of each other along a longitudinal center axis 58 of the device.

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