Device for liquid treatment of disk-shaped objects

Coating apparatus – Projection or spray type – With hood or offtake for waste material

Reexamination Certificate

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Details

C118S052000, C118S612000, C118S300000, C134S148000, C134S104200, C134S183000

Reexamination Certificate

active

07122084

ABSTRACT:
A device is suggested which includes a carrier (1) for receiving the disk-shaped object (10), a liquid supply device (17) for applying liquid onto a disk-shaped object (10) located on the carrier (1), and a liquid catch ring (2), which is positioned essentially coaxially around the carrier (1) and is rotatable around the axis of the liquid catch ring (2).

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patent: 2002/0195128 (2002-12-01), Shibagaki
patent: 0 444 714 (1991-09-01), None
patent: 0753884 (1997-01-01), None
patent: 2002/263554 (2002-09-01), None

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