Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Patent
1998-02-03
1999-01-12
Kunemund, Robert
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
For crystallization from liquid or supercritical state
117 14, 117201, 117202, C30B 1530
Patent
active
058580883
ABSTRACT:
The winding drum of the cable-winding device is kept air-tight by an air-tight container. A lower elastic sealing member 1a is interposed between the air-tight container and the rotation table. The air-tight container, the lower elastic sealing member 1a, and the chamber are communicated with one another. The air-tight container and the chamber are filled with inert gases at less than atmospheric pressure. The rotation table, the weight sensors, the drive motor, the gear are disposed in the atmosphere. An arm is vertically installed on the rotation table. An upper elastic sealing member 1b is interposed between the end portion of the arm and the air-tight container. The upper elastic sealing member is communicated the interior of the air-tight container through a through hole. The arm support the top portion of the upper elastic sealing member.
REFERENCES:
patent: 4663128 (1987-05-01), Helgeland et al.
patent: 4916955 (1990-04-01), Katsuoka et al.
patent: 5254319 (1993-10-01), Oda et al.
Hiraishi Yoshinobu
Kawabata Mitsunori
Tsuji Hideki
Chin Kin-Chan
Komatsu Ltd.
Kunemund Robert
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