Device for inspecting illumination optical device and method...

Details Device for inspecting illumination optical device and method... Device for inspecting illumination optical device and method...

2007-10-30

2007-10-30

Johns, Andrew W. (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C348S092000, C356S239100, C356S239200, C356S239300, C356S239400, C356S239500, C356S239600, C356S239700, C356S239800, C356S391000

Reexamination Certificate

active

10189445

ABSTRACT:
The invention provides a device to inspect an illumination optical device and a method to inspect an illumination optical device that make it possible to efficiently inspect illumination optical devices and to control manufacturing cost. A lens array inspecting device is provided with a light source device to emit a parallel luminous flux, lens array holders to retain lens arrays, which are test objects that split the parallel luminous flux into a plurality of partial luminous fluxes, and a ground glass on which the optical images of the luminous fluxes emitted through the lens arrays are projected. On the ground glass, a parting frame appropriate to a design illumination region is formed. Therefore, whether the lens arrays are defective or non-defective can be determined by checking whether the optical images projected onto the ground glass include the area of the parting frame.

REFERENCES:
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patent: 6148097 (2000-11-01), Nakayama et al.
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patent: A 2000-136982 (2000-05-01), None
patent: A-2002-328205 (2002-11-01), None

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