Device for inspecting a surface

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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Details

C356S071000, C356S445000, C356S600000, C250S559010, C250S559040, C250S559400, C250S559440, C382S112000, C382S135000

Reexamination Certificate

active

07969565

ABSTRACT:
A device that is usable to inspect the surface of a material uses an inspection system which includes an optical unit. That optical unit can register the light which is reflected by the surface to be inspected. An illumination system, that uses at least two light sources, provides the light. The optical unit and the illumination system are connected to a control unit. The at least two light sources are arranged spaced at a distance from each other and both emit light directed to a recording region of the optical unit. The optical unit is oriented toward the surface to be inspected and at least one of the illumination light sources can be subdivided into several individual light sources. The control unit controls at least two of the illumination system light sources that are arranged at a distance from each other or the respective individual light sources of at least one of the illumination sources both selectively and independently of each other. The recording region of the optical unit lies on a displacement plane of the surface to be inspected with that surface being displaced through the recording region in relation to the inspection system. The distance between the light sources of the illumination system extends in the displacement direction of the surface to be inspected. The individual light sources of at least one of the sources are arranged transversely to the displacement direction of the surface to be inspected.

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