Device for illuminating an area and device for applying...

Details Device for illuminating an area and device for applying... Device for illuminating an area and device for applying...

2008-12-22

2011-12-20

Ben, Loha (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

C359S619000, C359S621000, C359S624000, C359S626000, C359S455000, C362S231000, C362S244000, C362S268000

Reexamination Certificate

active

08081386

ABSTRACT:
Device for illuminating an area, in particular for illuminating a mask (14), for example for a lithographic application, with at least one light source (1) for producing light (3) that can be used for the illumination, optics means (2) for shaping the light (3) produced by the at least one light source (1), and separation means (4, 4′, 4″) capable of dividing the light (3) to be used for the illumination into several mutually separated partial beams (5), so that these partial beams (5) can illuminate the area to be illuminated with a spacing therebetween. The present invention also relates to a device for applying light to a work area.

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German Search Report Deutsches Patent-un Markenamt dated Aug. 21, 2008.
European Search Report dated Jan. 1, 2011.

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