Device for holding substrate wafers

Details Device for holding substrate wafers Device for holding substrate wafers

1981-07-13

1983-11-01

Beck, Shrive P.

Coating apparatus

Control means responsive to a randomly occurring sensed...

Sampling of associated base

118500, 118730, B05C 1114, B05C 1300

Patent

active

044125046

ABSTRACT:
Device for holding substrate wafers, especially semiconductor wafers, including a plurality of rings having disposed thereon at least one bearing surface, respectively, extending toward the interior of the respective ring, and means for yieldingly pressing the substrate wafers against the respective bearing surfaces.

REFERENCES:
patent: 3023727 (1962-03-01), Theodoseau et al.
patent: 3643625 (1972-02-01), Mahl
patent: 3699917 (1972-10-01), Deverse
patent: 3768440 (1973-10-01), Doman et al.
patent: 4010710 (1977-03-01), Williams

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