Device for holding and rotating a substrate

Details Device for holding and rotating a substrate Device for holding and rotating a substrate

1994-03-30

1994-12-27

Breneman, R. Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156639, 156640, C23F 102

Patent

active

053762169

ABSTRACT:
A plurality of substrate holding members and a substrate pressing member are disposed on a rotation stage at a peripheral portion. The substrate pressing member includes a magnet and is pivotally supported by the rotation stage. A ring-shaped permanent magnet is located below the rotation stage and forms a ring around the rotation axis of the rotation stage. When a substrate mounted on the rotation stage is rotated and processed, the ring-shaped permanent magnet is positioned in the vicinity of the magnet of the substrate pressing member. This creates a magnetic force between the magnets, causing the substrate pressing member to pivot so that the substrate pressing member contacts the edge of the substrate with a predetermined amount of pressure.

REFERENCES:
patent: 4278493 (1981-07-01), Petvai
patent: 5070813 (1991-12-01), Sakai
patent: 5081069 (1992-01-01), Parker
patent: 5171393 (1992-12-01), Moffat
patent: 5308447 (1994-05-01), Lewis

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