Device for holding a substrate

Details Device for holding a substrate Device for holding a substrate

1985-03-20

1986-05-20

Morgenstern, Norman

Coating apparatus

Work holders, or handling devices

118728, 211 41, B05C 1302

Patent

active

045893691

ABSTRACT:
A device for holding one or more substrates, each of substantially circular profile, especially in vacuum coating apparatus. In a vertical plate there is provided an opening on whose edge holding means are provided into which each substrate is fitted. In accordance with the invention, the opening has in its bottom area an approximately semicircular radial groove which is defined on both sides by semicircular rims. In its upper portion the opening has on one side a lip which merges with one of the rims in the lower part of the opening. On the other side there is disposed a counterbore offset eccentrically upward from the opening, whose radius is at least as great as the radius of the groove bottom. In this manner an insertion opening is formed on one side of the plate for the eccentric insertion of the substrate.

REFERENCES:
patent: 4449478 (1984-05-01), Kraus

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