Handling: hand and hoist-line implements – Grapple – Multiple grapples for multiple objects
Patent
1994-12-09
1997-01-21
Bucci, David A.
Handling: hand and hoist-line implements
Grapple
Multiple grapples for multiple objects
414941, 2941031, 294907, B66C 142
Patent
active
055954120
ABSTRACT:
The present invention provides a device for handling wafers with every group of more than one that is built in a cassette-less automatic wafer cleaning apparatus, wherein the group of wafers are washed at a time which does not require very high accuracy in positioning the wafers and may accommodate the wafers of any different diameters, the device for handling wafers comprising: external hollow shafts and internal shafts inserted and freely slidable within the inside of the external hollow shafts; a drive mechanism, wherein each pair of the external hollow shafts and the internal shafts are movable in their respective opposed directions by the same distances with a timing belt and a drive motor for driving the timing belt; a pair of handling members respectively held fast at pairs of ends side by side of each pair of the external hollow shafts and the internal shafts; and a plurality of supporting structures holding the wafers provided on the respective opposed surfaces of handling members.
REFERENCES:
patent: 4178119 (1979-12-01), Busch
patent: 4801168 (1989-01-01), Sato
patent: 5007788 (1991-04-01), Asano et al.
patent: 5030057 (1991-07-01), Nishi et al.
patent: 5188499 (1993-02-01), Tarng et al.
patent: 5374153 (1994-12-01), Nishi
patent: 5403057 (1995-04-01), Sugito et al.
patent: 5406092 (1995-04-01), Mokuo
Kudo Hideo
Uchiyama Isao
Bucci David A.
Hess Douglas
Shin-Etsu Handotai & Co., Ltd.
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