Device for handling substrates inside and outside a clean room

Details Device for handling substrates inside and outside a clean room Device for handling substrates inside and outside a clean room

2006-11-14

2006-11-14

Brahan, Thomas J (Department: 3654)

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

C414S937000, C414S940000

Reexamination Certificate

active

07134825

ABSTRACT:
A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a box (13) in clean-room conditions can be removed from or placed in said box (13); and with a first handling device (51), by which means the substrates (11) can be placed in or removed from the cassette (12). According to the invention, a storage area (20) for a plurality of cassette boxes (13) is positioned on or above the clean room (15) and the locking transfer device (17) is provided between the storage area (20) and the clean room (15), so that various work and production steps can be combined in such a way as to save space.

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patent: WO 99/02436 (1999-01-01), None
patent: WO 99/28951 (1999-06-01), None

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