Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
Patent
1996-06-03
1997-07-01
Bucci, David A.
Material or article handling
Movable rack having superposed, charge-supporting elements,...
Rack moved vertically by elevating means
414416, 414937, 454187, H01L 2100
Patent
active
056429789
ABSTRACT:
A device for handling disk-shaped objects in a handling plane of a local clean room has the object of ensuring process steps preceding or following the processing and inspection of the disk-shaped objects under the conditions of a local clean room with the use of SMIF boxes. The handling plane (H--H) is in a fixed constructional relationship with a reference plane (E--E) of at least one device comprising the magazine seat as a component part, which device serves to index the shelves of magazines and disk-shaped objects contained therein and is arranged above an intermediate base dividing the clean room into two partial spaces located one above the other, in which an air flow component of an air flow is directed from the partial space above the intermediate base into the partial space below the intermediate base. The device can be used in the manufacture of integrated circuits, particularly for handling tasks.
REFERENCES:
patent: 3923342 (1975-12-01), Shannon
patent: 3972424 (1976-08-01), Levy et al.
patent: 4746256 (1988-05-01), Boyle et al.
patent: 4781511 (1988-11-01), Harada et al.
patent: 4867629 (1989-09-01), Iwasawa et al.
patent: 4895486 (1990-01-01), Baker et al.
patent: 4904153 (1990-02-01), Iwasawa et al.
patent: 4923342 (1990-05-01), Kopkie et al.
patent: 4952299 (1990-08-01), Chrisos et al.
patent: 4954721 (1990-09-01), Suzuki
patent: 5007784 (1991-04-01), Genov et al.
patent: 5096477 (1992-03-01), Shinoda et al.
patent: 5145303 (1992-09-01), Clarke
patent: 5181819 (1993-01-01), Sakata et al.
patent: 5221201 (1993-06-01), Yamaga et al.
patent: 5297910 (1994-03-01), Yoshioka et al.
Patent Abstracts of Japan, M-1039, Oct. 24, 1990, vol. 14, No. 488.
Solid State Technology, 33(1990) Aug., # 8 (pp. S1-S5) "Wafer Confinement for Control of Contamination in Microelectronics" (Claude Doche).
Solid State Technology, 29(1986) Dec., # 12 (pp. 61-65) "SMIF System Performance at 0.22.mu.m Particle Size" (Harada, et al).
Extended Abstracts, 88-2 (1988) Fall, Princeton, NJ, # 409 (pp. 599-600) "A SMIF-Vacuum Interface Chamber . . . ".
Gaglin Axel
Heitmann Michael
Lahne Berndt
Scheler Werner
Schultz Klaus
Bucci David A.
Jenoptik GmbH
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