Device for generating X-radiation with a plasma source

Details Device for generating X-radiation with a plasma source Device for generating X-radiation with a plasma source

1990-08-16

1991-06-11

Westin, Edward P.

X-ray or gamma ray systems or devices

Source

Electron tube

378123, 378119, 378136, 31511171, 31511121, 31511161, H01J 3500

Patent

active

050238973

ABSTRACT:
The invention is an improvement in a device for generating X-radiation with a plasma source. In the device, two concentric cylindrical electrodes (11, 12) are separated by an evacuated discharge space (13) filled with low-pressure gas. When the inner electrode is momentarily raised to an extremely high voltage, the gas is ionized and a plasma shock wave (17, 17') is created and compressed into a plasma focus (21) emitting X-radiation (20). The improvement introduces a first ("discharge") gas into the discharge space for initiation of the plasma, while introducing a second ("emitting") gas into the inner electrode for generating the X-radiation in the plasma focus. Special features of the improved device include a plurality of gas extraction ports, which can be used independently or together, and which can be combined with variations in the introduction and flow of the two gases to control the movement and intermixture of the gases and, thereby, the operation of the device. Also, the device introduces a third gas for improving the transmission of the X-radiation from the generating plasma focus to a work station for X-ray microscopy or for X-ray lithography.

REFERENCES:
patent: 4596030 (1986-06-01), Herziger et al.
patent: 4792725 (1988-12-01), Levy et al.

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