Device for forming a compound oxide superconducting thin film

Details Device for forming a compound oxide superconducting thin film Device for forming a compound oxide superconducting thin film

1995-06-07

1997-12-02

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118729, C23C 1400

Patent

active

056931468

ABSTRACT:
There is disclosed a device for forming a thin film on a substrate by irradiating a target of a compound oxide superconducting material with a laser beam and evaporating on the substrate a thin film corresponding to a composition of the target in an oxygen ambient atmosphere by laser evaporation, a scanning optical system for causing the laser beam to scan being disposed in an optical path of the laser beam.

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