Chucks or sockets – Vacuum
Reexamination Certificate
2005-11-22
2005-11-22
Ashley, Boyer D. (Department: 3722)
Chucks or sockets
Vacuum
C118S500000
Reexamination Certificate
active
06966560
ABSTRACT:
A device or chuck for fixing thin and/or flexible substrates allows a uniform and all-over sucking-up of the substrates without any disadvantageous warping or bending. The chuck has notches and holes communicating with a plurality of microgrooves arranged on the bearing surface. If a vacuum device sucks off air through the bores and the notches, a vacuum extends in the microgrooves so that a substrate located on the bearing surface is sucked up.
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Demel Walter
Zoberbier Ralph
Ashley Boyer D.
Perman & Green, LLP.
Suss MicroTec Lithography GmbH
Talbot Michael W.
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