Device for fixing a planar work piece

Details Device for fixing a planar work piece Device for fixing a planar work piece

1978-12-11

1980-12-02

Watson, Robert C.

Work holders

With fluid means

Vacuum-type holding means

B25B 1100

Patent

active

042367018

ABSTRACT:
A device for fixing a planar work piece in position, particularly a semiconductor used in processing cycles for the production of integrated circuits. Said device having a supporting plane, a number of apertures being disposed in said supporting plane, said apertures being under reduced pressure, said work piece being pressed against said supporting plane by means of said reduced pressure. Said device being particularly suitable for precisely fixing a semiconductor substrate in the supporting plane, even in the case of extensive raised areas or warps on the lower side of the substrate. A number of independent reduced pressure systems are provided, said reduced pressure systems being connected with individual apertures or groups of apertures.

REFERENCES:
patent: 477305 (1892-06-01), Marsh
patent: 2317348 (1943-04-01), Wekeman
patent: 3293739 (1966-12-01), Hoglund et al.
patent: 3729206 (1973-04-01), Cachon et al.
patent: 3787039 (1974-01-01), Zeichman
patent: 3818327 (1974-06-01), Alexander

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