Device for fixing a flat object, in particular a substrate,...

Metal working – Means to assemble or disassemble – Means to assemble electrical device

Reexamination Certificate

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C029S721000, C029S743000

Reexamination Certificate

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08082661

ABSTRACT:
An apparatus (1) for fixing a planar object, in particular a substrate (2), on a working area (4) by means of vacuum is provided with an at least partly transparent bearing plate (5), one side of which forms the working area and which has a rear side arranged at a distance from the working area with a radiation-reflecting structure (7). The bearing plate additionally has vacuum channels which can be connected to a vacuum line and which open into the working area. In order to illuminate the substrate as homogeneously as possible by means of transmitted light, at least one light source (10) is provided, the radiation of which can be fed into the bearing plate. In addition, the working area is preferably operatively connected to a heating apparatus (11), so that the substrate (2) can be heated.

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patent: 5575549 (1996-11-01), Ishikawa et al.
patent: 6032997 (2000-03-01), Elliott et al.
patent: 6182957 (2001-02-01), Becker
patent: 6203082 (2001-03-01), Bendat et al.
patent: 6811884 (2004-11-01), Goodwin et al.
patent: 6853533 (2005-02-01), Parkhe
patent: 2006/0267294 (2006-11-01), Busse et al.
patent: 252 707 (1987-12-01), None

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