Metal working – Means to assemble or disassemble – Means to assemble electrical device
Reexamination Certificate
2005-12-20
2011-12-27
Phan, Thiem (Department: 3729)
Metal working
Means to assemble or disassemble
Means to assemble electrical device
C029S721000, C029S743000
Reexamination Certificate
active
08082661
ABSTRACT:
An apparatus (1) for fixing a planar object, in particular a substrate (2), on a working area (4) by means of vacuum is provided with an at least partly transparent bearing plate (5), one side of which forms the working area and which has a rear side arranged at a distance from the working area with a radiation-reflecting structure (7). The bearing plate additionally has vacuum channels which can be connected to a vacuum line and which open into the working area. In order to illuminate the substrate as homogeneously as possible by means of transmitted light, at least one light source (10) is provided, the radiation of which can be fed into the bearing plate. In addition, the working area is preferably operatively connected to a heating apparatus (11), so that the substrate (2) can be heated.
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Kulicke & Soffa Die Bonding GmbH
Phan Thiem
Spletzer, Sr. Christopher M.
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