Device for exchanging masks

Details Device for exchanging masks Device for exchanging masks

1985-05-07

1986-08-05

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Detailed holder for original

355 53, G03B 2762

Patent

active

046039686

ABSTRACT:
A device for exchanging masks used in the photolithographic treatment of semiconductor devices comprises a rotatable disk (1), on which supporting places for a number of masks (5,6) are present, which disk can be arranged by rotation in a position in which one of the mask supporting places is in a position desired for photolithographic treatment, said position can be determined by means of a detector (19), which, after a position-servo-system has been switched into circuit, supplies a detector signal to this system and thus controls the adjustment of the disk. For rotation of the disk (1), two electromagnetic movement systems (7,13; 8,14) are present each comprising a magnet and a coil, wherein either the pair of magnets or the pair of coils is fixedly arranged and the other pair is provided on the turntable and is rotatable therewith, a current connection for the coils being present to supply a constant current to the coils.

REFERENCES:
patent: 4194836 (1980-03-01), Rapp et al.
patent: 4477182 (1984-10-01), Takanashi et al.

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