Coating apparatus – Immersion or work-confined pool type – Work extending through pool-confining wall area
Patent
1981-09-02
1983-09-27
Smith, John D.
Coating apparatus
Immersion or work-confined pool type
Work extending through pool-confining wall area
118412, 118423, 156622, H01L 21208
Patent
active
044062451
ABSTRACT:
A device for simultaneously producing a plurality of substrate disks each having a plurality of different layers by a liquid phase epitaxy as each substrate disk is moved sequentially through different melts contained in the liquid phase characterized by a first unit having tongues slidably received therein and a plurality of chambers spaced along the direction of sliding of said tongues, a second unit having a crucible for each of said chambers being disposed for relatively movement on the first unit from a position with the crucible out of communication with the chamber to a position in communication for transferring the melt from the crucible to the chamber and each of the said tongues having aligned recesses for receiving the substrate disk so that a row of substrate disks can be passed from one chamber to the next following chamber so that the disks in each row receive epitaxial layers sequentially.
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L. R. Dawson, "High-Efficiency Graded-Band-Gap Ga.sub.1-x Al.sub.x A.sub.s Light Emitting Diodes", Journal of Applied Physics, vol. 48, No. 6, Jun. 1977, pp. 2485-2492.
Zhilenis et al., "Cassette for Batch Growth of Layers by the Liquid-Epitaxy Method", Instruments and Experimental Techniques, vol. 19, No. 4, 1976, pp. 1221-1222.
Niina et al., "An Improved Liquid Phase Epitaxial Growth Method for Mass Production of GaP Green LED's", IEEE Trans. on Electron Devices, vol. ED-24, No. 7, Jul. 1977, pp. 946-950.
Plantz Bernard F.
Siemens Aktiengesellschaft
Smith John D.
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