Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1989-02-24
1990-07-31
Miller, Edward A.
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
350397, 20415722, 422186, 4221863, G02B 2714, B01D 5934
Patent
active
049445731
ABSTRACT:
A device for distributing laser beams used in an isotopic separation method. The plurality of laser beams S.sub.n used in the process; where n is a whole number at least equal to 2, are divided by means of a plurality of partially reflecting mirrors and superimposed by suitable dichroic mirrors. The superimposed beams, during several passages, are sent into a reaction chamber. When one of these beams has its fluence equal to the saturation fluence, a new part of the beam is superimposed onto the beams. This is accomplished by means of a suitable dichroic mirror. The interference between this new part and the residual beam having traversed the chamber are avoided. A specific application is for the isotopic separation of uranium vapor by laser beams.
REFERENCES:
patent: 4073572 (1978-02-01), Avicola
patent: 4174150 (1979-11-01), Congleton
patent: 4189646 (1980-02-01), Vanderleeden
patent: 4762402 (1988-08-01), Michon et al.
Commissariat a l''Energie Atomique
Mai Ngoclan T.
Miller Edward A.
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