Optical: systems and elements – Single channel simultaneously to or from plural channels
Reexamination Certificate
2006-04-13
2009-10-20
Schwartz, Jordan M. (Department: 2873)
Optical: systems and elements
Single channel simultaneously to or from plural channels
C359S629000
Reexamination Certificate
active
07605979
ABSTRACT:
A device for directing radiation to a layer (1) is described. The device includes a first optical element (L1) for focusing a first radiation beam (B1) originating from a first radiation source (S1) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (B1). In this way a compact and light configuration of L1and L2is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.
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Written Opinion of the International Searching Authority for International Application No. PCT/UB2006/051149.
Neijzen Jacobus Hermanus Maria
Van Santen Helmar
Jones James C
Koninklijke Philips Electronics , N.V.
Schwartz Jordan M.
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