Device for directing electrically charged particles towards a ta

Radiant energy – With charged particle beam deflection or focussing – With detector

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Details

250492A, 250398, H01J 3700

Patent

active

042608937

ABSTRACT:
A device for directing electrically charged particles towards a target present on a connection place of a support comprises an electrostatic deflection system having deflection plates for controlling a beam of charged particles in two mutually perpendicular directions towards the target with the deflection plates being brought at a desired voltage by means of an electronic control system, and two juxtaposed rods of electrically conductive material being provided on oppositely located sides of the target with the rods being each connected by a resistor to a fixed potential and being furthermore connected to a control device which reacts to a voltage which arises across the resistors if the beam of electrically charged particles impinges on a rod and which, if the beam, during each stroke across the target, impinges on a combination of rods other than the two innermost rods, produces a correction voltage for the control of the deflection plates.

REFERENCES:
patent: 3576438 (1971-04-01), Pease
patent: 4071765 (1978-01-01), Van Oostrum et al.
patent: 4119854 (1978-10-01), Tanaka et al.

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