Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1997-06-26
1998-11-17
Kim, Robert
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356360, G01B 902
Patent
active
058384421
ABSTRACT:
The present invention relates to a device for determining the shape of the wave surface reflected by a substantially plane component (P), which includes a support (S) for the component (P), an interferometer (I), means for moving the support (S), and a control unit which determines, from the measurements by the interferometer (I), the shape of said wave surface.
According to the invention, the device additionally includes a swivelling mirror (M1), which directs the measurement beam (FM) of the interferometer (I) orthogonally onto a surface (2) of the component (P), and an optical sensor (CO), which determines the position of the image of a light point (PO) of the measurement beam (FM), the orientation of the mirror (M1) being controlled in such a way as to bring the light point (PO) back to a reference position automatically.
REFERENCES:
patent: 3338130 (1967-08-01), Gaffard
patent: 4792228 (1988-12-01), Haffner
patent: 5337140 (1994-08-01), Hagiwara et al.
patent: 5343410 (1994-08-01), Tsujiuchi et al.
patent: 5473435 (1995-12-01), Masuyuki et al.
French Search Report, 3 pages, dated Mar. 3, 1997.
Compagnie Industrielle des Lasers Cilas
Kim Robert
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