Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1988-12-15
1990-02-20
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
250561, 356400, G01N 2186, G01N 904
Patent
active
049029002
ABSTRACT:
A device for detecting the levelling of an object disposed on a plane substantially perpendicular to the optic axis of main objective optical means and worked by a radiation beam from the main objective optical means comprises levelling detecting optical means including an irradiating optical system for supplying a collimated light beam to a particular area of the surface of the object from an oblique direction, and a condensing optical system having light receiving means and for condensing the light beam reflected by the particular area on the light receiving means, and field stop means providing a plurality of stop openings differing in shape from one another, the field stop means being disposed in the levelling detecting optical means, one stop opening corresponding to the shape of the particular area being selected from among the plurality of stop openings.
REFERENCES:
patent: 4558949 (1985-12-01), Uehara et al.
patent: 4693615 (1987-09-01), Kyriakis
patent: 4770531 (1988-09-01), Tanaka et al.
patent: 4780616 (1988-10-01), Nishi et al.
Kamiya Saburo
Mizutani Hideo
Nelms David C.
Nikon Corporation
Oen William L.
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