Device for detecting the deflection signal of the electron beam

Details Device for detecting the deflection signal of the electron beam Device for detecting the deflection signal of the electron beam

1977-12-29

1979-09-04

Anderson, Bruce C.

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

G01T 122

Patent

active

041669568

ABSTRACT:
A device for detecting the detection signal of the electron beam produced by an electron gun provided with a target on a semiconductor material. The target is scanned by the electron beam when operating. The target is provided upon one of its faces with a series of semiconductor elements generating electrical charge carriers under the effect of bombardment by the electron beam. The semiconductor elements are arranged, considered in the direction of scanning of the beam, to form an array of elementary generators. The array of elementary generators is designed to form two rows of elementary generator means. The rows are separated by a zone which is insensitive to the high energy electron beam when the latter is focused on that insensitive zone in the quiescent state. The information from the corresponding elementary generator is furnished in operation by sequential read out of the elementary generators.

REFERENCES:
patent: 3529161 (1970-09-01), Oosthoek et al,
patent: 3928768 (1975-12-01), Crowell

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