Electrical resistors – Incased – embedded – or housed – Element in insulation with outer metallic sheath
Patent
1988-08-18
1991-04-02
Wojciechowicz, Edward J.
Electrical resistors
Incased, embedded, or housed
Element in insulation with outer metallic sheath
357 51, 357 52, 357 68, 338 32R, H01L 2722, H01L 2982, H01L 2996, H01L 4300
Patent
active
050050648
ABSTRACT:
According to this invention, a device for detecting magnetism comprises; a substrate, an interposed insulating layer containing impurities therein, formed on the substrate, and a ferromagnetic magnetoresistive element formed on the interposed layer, wherein at least a portion of the interposed layer on which the ferromagnetic magnetoresistive element is formed has a concentration of impurities of less than a predetermined value. Further, in the device of this invention, the surface of the layer interposed between the substrate and the ferromagnetic magnetoresistive element has a surface roughness of less than 120 and an angle between a contacting surface of a conductive wiring and the ferromagnetic magnetoresistive element and the surface of the interposed layer is less than 78 degrees. Therefore, a device wherein a deterioration of the quality film of the ferromagnetic magnetoresistive element can be avoided and a reduction of the ratio of the resistance variation of the ferromagnetic magnetoresistive element can be maintained at less than 10% can be obtained, and further, a device wherein the generation of noise can be effectively suppressed so that the device is highly sensitive to magnetism and has a high S/N ratio, and further, the breakdown ratio caused by wiring breakages is effectively reduced, can be obtained.
REFERENCES:
patent: 4036723 (1977-07-01), Schwartz et al.
patent: 4319188 (1982-03-01), Ito et al.
patent: 4649342 (1987-03-01), Nakamura
patent: 4754221 (1988-06-01), Ao
patent: 4785342 (1988-11-01), Yamanaka et al.
Ao Kenichi
Arasuna Toshikazu
Izawa Ichiro
Yoshino Yoshimi
Crane Sara W.
Nippondenso Co. Ltd.
Wojciechowicz Edward J.
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