1981-07-20
1985-06-18
Edlow, Martin H.
357 30, 357 35, H01L 2714
Patent
active
045243743
ABSTRACT:
A device for detecting infrared rays and a method for manufacturing the same having an improved sensitivity in the infrared range. A first region of a second conductivity type is formed on a substrate of a first conductivity type by diffusion or ion-implantation. Second and third regions of the same conductivity type as the substrate are formed in the first region and the substrate by diffusion or ion-implantation. A metal such as platinum, gold or palladium is evaporated onto an exposed part of the first region by sputtering. The metal layer thus deposited is annealed to form a Schottky contact.
REFERENCES:
patent: 3971057 (1976-07-01), Connors et al.
patent: 4015283 (1977-03-01), Hayashi et al.
Wood, R. A., "Schottky Barrier Alloy-Junction Guard Ring" IBM Tech. Disclosure Bull., vol. 12, No. 7, p. 1057, Dec. 1969.
Denda Masahiko
Tsubouchi Natsuro
Edlow Martin H.
Mitsubishi Denki K.K.
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