Optics: measuring and testing – Lens or reflective image former testing – For optical transfer function
Patent
1986-10-14
1988-09-20
Rosenberger, R. A.
Optics: measuring and testing
Lens or reflective image former testing
For optical transfer function
356356, G01B 900
Patent
active
047721197
ABSTRACT:
A device is described for detecting a magnification error in an optical imaging system comprising a lens system (L.sub.1, L.sub.2) which is telecentric at one side. Two gratings (RG.sub.1, RG.sub.2) arranged in the object plane (MA) are imaged onto two gratings (WG.sub.1, WG.sub.2) arranged in the image plane (W; WT) and the radiation beams (b.sub.1, b.sub.2) by means of which these images are formed are incident on two radiation-sensitive detection systems (D.sub.1, D.sub.2) which supply periodic signals (S.sub.1, S.sub.2). By phase comparison of these signals a magnification error (S.sub.ME) and, if desired, a focussing error can be measured very accurately.
REFERENCES:
patent: 4577968 (1986-03-01), Makosch
patent: 4629313 (1986-12-01), Tanimoto
patent: 4631416 (1986-12-01), Turtna, Jr.
Akkermans Antonius H.
Bouwhuis Gijsbertus
Van De Looy Guido C.
Cooper Crystal
Mayer Robert T.
Rosenberger R. A.
U.S. Philips Corp.
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