Coating apparatus – Gas or vapor deposition – Running length work
Patent
1983-12-21
1985-04-02
Smith, John D.
Coating apparatus
Gas or vapor deposition
Running length work
118715, 118729, 4272552, 4272553, 427255, 65 6051, 239406, 239404, C23C 1310
Patent
active
045080542
ABSTRACT:
Reactive gases providing a coating on a substrate by CVD are made to meet in counterflow, in order to ensure, by the turbulence effect, that there is an almost instantaneous mixing of the reagents. The movement of the gases before contact is ensured by two pipes containing baffles, the effect of which is to cause the gases to rotate in opposite directions to one another.
REFERENCES:
patent: 2526220 (1950-10-01), Goddard
patent: 3511703 (1970-05-01), Peterson
patent: 3642521 (1972-02-01), Moltzan et al.
patent: 3674453 (1972-07-01), Loukes et al.
patent: 3850679 (1974-11-01), Sopko et al.
patent: 4270576 (1981-06-01), Takeda et al.
patent: 4414015 (1983-11-01), Van Laethem et al.
Baumberger Otto
Kalbskopf Reinhard
Battelle (Memorial Institute)
Dubno Herbert
Plantz Bernard F.
Ross Karl F.
Smith John D.
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