Device for correcting reference position for transfer...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Position measurement

Reexamination Certificate

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Reexamination Certificate

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10534709

ABSTRACT:
Disclosed herein is a conveying mechanism disposed in a conveying vessel which includes: a moving member which can move in a horizontal moving direction; a rotary table attached to the moving member such that the rotary table can turn in a horizontal turning direction and move in the vertical direction; and two arm mechanisms which can bend and stretch in a horizontal operating direction relative to the rotary table. Also disclosed herein is a reference position correcting device for the conveying mechanism and methods of correcting reference positions of the conveying mechanism. The reference position correcting device includes: a light emitter for emitting a sensing light beam; a light detector for receiving the sensing light beam; and a correcting device.

REFERENCES:
patent: 6510365 (2003-01-01), Nishinakayama et al.
patent: 6514345 (2003-02-01), Nagata et al.
patent: 03-104575 (1991-05-01), None
patent: 10-329083 (1998-12-01), None
patent: 2000-127069 (2000-05-01), None
patent: 2001-156153 (2001-06-01), None
patent: 2001-252883 (2001-09-01), None
patent: 2002-064128 (2002-02-01), None
International Preliminary Examination Report (PCT/IPEA/409) (Translated) for PCT/JP2003/014479.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report issued for PCT/JP2003/014479.

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