Data processing: measuring – calibrating – or testing – Calibration or correction system – Position measurement
Reexamination Certificate
2007-01-23
2007-01-23
Nghiem, Michael (Department: 2863)
Data processing: measuring, calibrating, or testing
Calibration or correction system
Position measurement
Reexamination Certificate
active
10534709
ABSTRACT:
Disclosed herein is a conveying mechanism disposed in a conveying vessel which includes: a moving member which can move in a horizontal moving direction; a rotary table attached to the moving member such that the rotary table can turn in a horizontal turning direction and move in the vertical direction; and two arm mechanisms which can bend and stretch in a horizontal operating direction relative to the rotary table. Also disclosed herein is a reference position correcting device for the conveying mechanism and methods of correcting reference positions of the conveying mechanism. The reference position correcting device includes: a light emitter for emitting a sensing light beam; a light detector for receiving the sensing light beam; and a correcting device.
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International Preliminary Examination Report (PCT/IPEA/409) (Translated) for PCT/JP2003/014479.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report issued for PCT/JP2003/014479.
Kamigaki Toshio
Saeki Hiroaki
Nghiem Michael
Shinko Electric Co, Ltd.
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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