Device for cooling integrated circuit chip

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor

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165 804, 357 82, H05K 720

Patent

active

046866060

ABSTRACT:
A cooling structure for cooling a multichip module for effectively removing heat generated from integrated circuit chips. A suction plate formed with minute grooves on one of its surfaces is disposed between each integrated circuit chip and an associated cooling block and is brought into contact at a grooved surface with the integrated circuit chip through a layer of a liquid such as silicone oil interposed therebetween, thereby producing negative hydrostatic pressure by capillary action of the minute grooves. The suction plate has a thickness small enough to be bent under influence of the negative hydrostatic pressure to follow a warping of the integrated circuit chip, so that the clearance between the opposing surfaces of the suction plate and the integrated circuit chip can be minimized. Thus, an integrated circuit chip cooling device of surface-to-surface contact type operable with a low thermal resistance is provided, which can improve the maintainability and reliability without sacrificing the cooling efficiency.

REFERENCES:
patent: 4558395 (1985-12-01), Yamada
patent: 4567505 (1986-01-01), Pease
Balde, Res., IBM Tech Discl Bull, vol. 20, No. 11A, Apr. 1978, p. 4336, "Liquid Cooling of-Package".
Bergles, IBM Tech Discl. Bull, vol. 22, No. 8A, Jan. 1980, p. 3318, "Two-Piece Cold Plate-Surface".
Berndlmaier, IBM Tech Discl. Bull, vol. 20, No. 11B, Apr. 1978, p. 4817, "Liquid-Metal-Cooled-Structures".
Electronics (Jun. 16, 1982), vol. 55, No. 12, p. 143, "Thermal-Chips", Barbour.
"Microcapillary Thermal Interface Technology for VLSI Packaging", David B. Tuckerman and R. Fabian Pease.

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