Device for controlling semiconductor wafer transport cassettes

Details Device for controlling semiconductor wafer transport cassettes Device for controlling semiconductor wafer transport cassettes

1997-02-07

1999-07-27

Mullen, Thomas

Communications: electrical

Condition responsive indicating system

Specific condition

340525, 3406864, 3406865, 3406911, 414940, G08B 2100

Patent

active

059297662

ABSTRACT:
The invention relates to a dimensional control device for semiconductor wafer transport cassettes. Each cassette has a base from which extend vertical walls including horizontal grooves designed to receive wafers by lateral insertion. The device includes a seat provided with positioning guides of a cassette base; switches placed on the seat so that the actuation of all the switches by the positioned base indicate a suitable planarity of the base; a drawer mounted slidably on the seat so as to be engageable in the cassette in the insertion direction of the wafers, and having at least one template corresponding to a high position groove of the cassette; and a stop placed on the seat, at the side opposite to the drawer with respect to the cassette, to cause a tilting of the cassette when the drawer is moved towards the cassette and the template does not correspond to the cassette.

REFERENCES:
patent: 4776744 (1988-10-01), Stonestreet et al.
patent: 4836733 (1989-06-01), Hertel et al.
patent: 4907931 (1990-03-01), Mallory et al.
patent: 4996436 (1991-02-01), Doeuvne et al.
patent: 5291025 (1994-03-01), Smith
patent: 5485759 (1996-01-01), Goff et al.

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