Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2008-09-03
2011-11-08
Crawford, Gene (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C700S121000, C700S117000, C700S109000
Reexamination Certificate
active
08055378
ABSTRACT:
A processing system includes process modules, load lock modules, an equipment controller, and a machine controller. The equipment controller controls transfer and processing of wafers in the processing system. A transfer destination determining portion determines the transfer destination of each wafer such that each wafer is sequentially transferred to a normally operating process module. When an abnormality occurs in a process module, an evacuation portion temporarily evacuates to a cassette stage the wafer determined is to be transferred to the abnormal process module and that has not yet been transferred to the abnormal process module. When a new transfer destination of the evacuated wafer is determined, if a process that is performed immediately before processing the evacuated wafer in the processing module as the new transfer destination satisfies a predetermined condition, a transfer inhibition portion inhibits the transfer of the evacuated wafer to the new transfer destination.
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Crawford Gene
Cumbess Yolanda
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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