Device for conditioning polishing pads

Details Device for conditioning polishing pads Device for conditioning polishing pads

1994-01-04

1996-01-23

Kisliuk, Bruce M.

Abrading

Abrading process

With tool treating or forming

451443, 451444, 451548, 451159, 451173, 451285, 451413, B24B 100

Patent

active

054861314

ABSTRACT:
A device for conditioning the surface of a polishing pad covering a platen mounted on a polishing machine for rotation about a vertical axis, comprising a rigid carrier element carrying cutting means on its bottom surface and which is adapted for vertical movement into and out of engagement with the surface of a polishing pad and which is adapted for oscillating horizontal movement over the surface of the polishing pad. The cutting means are dispersed in a circular or ring configuration.

REFERENCES:
patent: 4102084 (1978-07-01), Bloomquist
patent: 4663890 (1987-05-01), Brandt
patent: 4720938 (1988-01-01), Gosis
patent: 4760668 (1988-08-01), Schlaefli
patent: 5081051 (1992-01-01), Mattingly et al.
patent: 5216843 (1993-01-01), Breivogel et al.
Exhibit A--Sketch.

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