Device for compensating for a test temperature deviation in...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S1540PB, C324S765010

Reexamination Certificate

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06861861

ABSTRACT:
A semiconductor device handler is provided, in which a test temperature deviation of a semiconductor device caused by heat produced by the semiconductor device itself during testing is compensated for, allowing a test of the semiconductor device to be carried out at an exact temperature, or within an exact temperature range. The semiconductor device handler includes at least one enclosed chamber, a heating/cooling apparatus configured to bring an inside of the at least one chamber to a low or high temperature state, a pushing unit provided within the at least one chamber and configured to push a plurality of semiconductor devices mounted on a test tray into test sockets of a test board located within the at least one chamber for testing, a cooling fluid supplying apparatus configured to supply cooling fluid, a nozzle assembly configured to spray cooling fluid received from the cooling fluid supplying apparatus onto the semiconductor devices fitted to the test sockets, and a control unit configured to control spraying of cooling fluid onto the semiconductor devices during testing to compensate for temperature changes of the semiconductor devices that occur during testing.

REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.
patent: 3979671 (1976-09-01), Meeker et al.
patent: 4787752 (1988-11-01), Fraser et al.
patent: 5909657 (1999-06-01), Onishi et al.
patent: 6104183 (2000-08-01), Kobayashi et al.
patent: 6384593 (2002-05-01), Kobayashi et al.

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