Device for compensating deformations of a part of an optomechani

Details Device for compensating deformations of a part of an optomechani Device for compensating deformations of a part of an optomechani

1995-10-30

1998-12-08

Ullah, Akm E.

Optical waveguides

With optical coupler

Switch

385 16, 385 19, 7351421, 7351424, 7351436, 7351438, G02B 626, G01P 1500

Patent

active

058482067

ABSTRACT:
Device for compensating deformations of a part of an optomechanical or micromechanical system. This device compensates deformations, in a first direction (z), of a mobile part (26) of an apparatus, e.g. of a micromechanical and optomechanical nature, said mobile part being displaceable in a second direction (y), and having at least one arm (50, 52) connecting on the one hand a free end of the mobile part and a fixed part (16) of the apparatus, said arm having an adequate flexibility in the second direction (y), so as not to impede the displacement of the mobile part in said second direction (y), and an adequate rigidity in the first direction (z), so as to limit the deformations of the mobile part in said first direction.

REFERENCES:
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patent: 5239599 (1993-08-01), Harman
IEEE Transactions on Electron Devices, vol. ed-25, No. 10, Oct. 1978, pp. 1241-1249, K. E. Petersen, "Dynamic Micromechanics on Silicon: Techniques and Devices".
Journal of Applied Physics, vol. 39, No. 99, pp. 4458-4459, Aug. 1968, C. M. Drum, "A Low-Stress Insulating Film on Silicon by Chemical Vapor Deposition".
International Conference on Solid State Sensors and Actuators, Digest of Technical Papers, pp. 957-960, 1991, no month M. Orpana et al., "Control of Residual Stress of Polysilicon Thin Film by Heavy Doping in Surface Micromachining".

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