Device for cleaning in particular of disc-shaped oxide substrate

Details Device for cleaning in particular of disc-shaped oxide substrate Device for cleaning in particular of disc-shaped oxide substrate

1988-09-27

1990-10-02

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

134105, 134135, B08B 704

Patent

active

049601415

ABSTRACT:
A method and a device for cleaning in particular of oxide substrates is proposed, the substrates being extracted from a quantity of extremely pure water after pre-cleaning. The temperature of the substrate and the extraction velocity from the water are so selected that a water film extending from the water surface runs off evenly.

REFERENCES:
patent: 2057177 (1936-10-01), Wolff
patent: 4694527 (1987-09-01), Yoshizawa

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