Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1984-02-16
1987-06-09
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158P, 324 73PC, 324 725, G01R 3122, G01R 1512, G01R 3102
Patent
active
046723137
ABSTRACT:
A device for checking the mobile electrical charges in a MOS integrated circuit having a wafer support, a polarization means applying a potential difference between the two faces of the silicon wafer on which are formed the integrated circuits by means of two electrodes, one constituted by a conductive diaphragm covering the silicon wafer and which is kept in contact with the silicon wafer by a pressure difference between these two faces, while the other is constituted by the electrically conductive wafer support.
REFERENCES:
patent: 3405361 (1968-10-01), Kattner et al.
patent: 3596228 (1971-07-01), Reed, Jr. et al.
patent: 3949295 (1976-04-01), Moorshead
patent: 3979671 (1976-09-01), Meeker et al.
patent: 4340860 (1982-07-01), Teeple, Jr.
IBM Technical Disclosure Bulletin, vol. 16, No. 2, Jul. 1973, N.Y. (US), H. W. Curtis et al, "Probe Analysis Technique for Semiconductor Testing", pp. 692-693.
IBM Technical Disclosure Bulletin, vol. 14, No. 6, Nov. 1971, N.Y. (US), R. Hammer, "High-Temperature Multicontact Test Probe", pp. 1924, 1925.
Hartmann Joel
Jeuch Pierre
Commissariat a l''Energie Atomique
Eisenzopf Reinhard J.
Nguyen Vinh P.
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