Device for characterizing semiconductor samples by photoluminesc

Details Device for characterizing semiconductor samples by photoluminesc Device for characterizing semiconductor samples by photoluminesc

1989-07-07

1990-09-04

Hannaher, Constantine

Radiant energy

Luminophor irradiation

G01N 2164

Patent

active

049547135

ABSTRACT:
A device is described for characterizing wafers of semiconductor materials by photoluminescence with high spatial resolution and at low temperature, this device comprising at least:

REFERENCES:
patent: 3800161 (1974-03-01), Scott et al.
patent: 4786813 (1988-11-01), Svanberg et al.
patent: 4859063 (1989-08-01), Fay et al.

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