Device for and method of generating extreme ultraviolet...

Details Device for and method of generating extreme ultraviolet... Device for and method of generating extreme ultraviolet...

2004-03-09

2008-12-02

Song, Hoon (Department: 2882)

X-ray or gamma ray systems or devices

Source

Target

C250S50400H

Reexamination Certificate

active

07460646

ABSTRACT:
A method for generating extreme ultraviolet and/or soft X-ray radiation by a plasma that can be generated through irradiation of a material. In order to obtain a reduction in the contamination of an optical illumination system as well as an instantaneous optimization of the power of a radiation source, at least a quantity of the material is controlled by a blocking device.

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