Device for and method of evaluating semiconductor integrated cir

Details Device for and method of evaluating semiconductor integrated cir Device for and method of evaluating semiconductor integrated cir

1992-12-04

1996-04-02

Karlsen, Ernest F.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Using radiant energy

324768, 324769, G01R 3126

Patent

active

055044310

ABSTRACT:
A luminescence amount detecting part detects a weak optical radiation which a transistor in a semiconductor integrated circuit emits owing to a hot carrier effect. An output thereof is image-processed by an image processing part. An information storage part stores information on a transistor width and information on a switching frequency at an execution of a test pattern into each transistor. A switching time calculating part evaluates a switching time of the transistor from respective outputs of the image processing part and the information storage part to output a result. Thus the switching time can be evaluated easily without a electron beam tester whose operation is complicated. A delay time can be evaluated by detecting a luminescence amount which changes depending on a gate voltage, instead of measuring a gate voltage.

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